Microfabrication at UGA

In year 2003, Drs. Guigen Zhang and Yiping Zhao have established the first nano/microfabrication lab at University of Georgia in Driftmier Engineering Center. The main objectives of this initiative is to develop a nano/micro fabrication lab at UGA to promote research and educational activities in the areas of nanotechnology, biomedical sciences and engineering, environmental and agricultural engineering, etc. The main functions of this lab include:

• Fabrication of novel chemical and biological sensors
• Development of micro-electro-mechanical system (MEMS), and bio-MEMS substrates and devices, including microfluidic systems, and bio-chips
• Fabrication and characterization of nanostructures and nano-devices
• Development of nano-electro-mechanical system (NEMS) and bio-NEMS devices
• Training of graduate and undergraduate students in nano/micro fabrication

Currently we have the ability to perform the following processes: photoresist coating and developing, photolithography, metal thin film deposition, plasma etching, polymer thin film coating (Parylene), spin coating, film thickness measurement (profilimetry), atomic force microscopy, and electric testing. We welcome all the collaborations from the UGA comminuties.

Mask Aligner	Class 100 Cleanroom
Atomic Force Microscopy	Spin Coater
Plasma Etcher	Test Stage
Thermal Evaporator	Parylene Deposition System