Recently, nanostructured substrates, especially one dimensional nanostructures such as nanorods and nanowires, have been used extensively to improve the sensitivity and reliability of conventional chemical and biological sensors. In order to make practical devices, the nanofabrication technique should have the ability to fabricate the desired one-dimensional nanorod structures with specific size, shape, alignment, and architectures. In particular, the challenges for the nanostructure fabrication method are: (1) the ability to control the size, aspect ratio, shape of the nanostructures; (2) the ability to grow the desired nanostructure at low temperature and onto a particular substrate geometry, e.g . flat, cylindrical or tapered; (3) the ability to fabricate metallic and dielectric nanostructures with multilayer structures; and (4) the ability to seamlessly integrate the fabrication process with other conventional microfabrication techniques.
We are particularly interested in a surface enhanced Raman spectroscopy (SERS) based sensor. Our preliminary SERS experiments on Ag nanorod samples have shown very promising results. A stepped nanorod sample was deposited onto a Ag-coated glass slide resulting in six different regions, denoted as A, B, C, D, E, and F (Fig. 1). These six regions have randomly aligned Ag nanorod arrays with lengths of l = 0, 190, 218, 300, 366, and 508 nm, respectively. The SEM images in Fig. 1 show representative morphologies of several of the structures. The diameter of the Ag nanorods is about 80-90 nm.